Continuous bulk drain for photoresist

Details Continuous bulk drain for photoresist Continuous bulk drain for photoresist

1987-10-06

1989-02-14

Lacey, David L.

Coating apparatus

With means to centrifuge work

118501, 222585, 156345, B11C 1300

Patent

active

048039462

ABSTRACT:
A collection and draining system for use in a manufacturing process. This system comprises a collection tank coupled with a collector, the collector consisting of a funnel and a stem. The stem of the collector extends sufficiently into the collection tank such that the bottom of the stem is always covered with the solvent being collected during normal operations of the collection system. This is accomplished by locating the drain in the collection tank above the bottom of the stem. This results in reduced build up of solvents along the walls of the collection tank and the collector. In addition, by allowing the drain of the collection tank to drain into a main drain system, removal of the collection tank from a machine it is attached to during operation of the machine is unnecessary. Removal is only necessary during cleaning of the collection tank or the collector.

REFERENCES:
patent: 809891 (1906-01-01), Baldwin
patent: 923465 (1909-06-01), Trepanier
patent: 1100223 (1914-06-01), Butters

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