Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1981-03-16
1983-10-18
Smith, John D.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
29572, 427 74, 427 75, 427 86, 204 38A, 148 15, H01L 3104
Patent
active
044105584
ABSTRACT:
The continuous production of solar cells by the glow discharge (plasma) deposition of layers of varying electrical characteristics is achieved by advancing a substrate through a succession of deposition chambers. Each of the chambers is dedicated to a specific material type deposition. The chambers are mutually isolated to avoid the undesired admixture of reaction gases therebetween. Each plasma deposition is carried out in its glow discharge area, chamber, or chambers, with isolation between the plasma regions dedicated to different material types. Masking, mechanical or lithographic, can be employed relative to the substrate to cause the deposition in the desired configuration. After the semiconductor deposition is complete, top contact and anti-reflection layer or layers are deposited, followed by a protective lamination.
REFERENCES:
patent: 3367304 (1968-02-01), Robbins
patent: 3969163 (1976-07-01), Wakefield
patent: 4064521 (1977-12-01), Carlson
patent: 4226898 (1980-10-01), Ovshinsky
Cannella Vincent D.
Izu Masatsugu
Ovshinsky Stanford R.
Energy Conversion Devices Inc.
Siskind Marvin S.
Smith John D.
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