Continual flow rapid thermal processing apparatus and method

Details Continual flow rapid thermal processing apparatus and method Continual flow rapid thermal processing apparatus and method

1997-06-05

2000-09-05

Walberg, Teresa

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

392416, 392418, 219407, F27N 906, F26B 1900

Patent

active

061146625

ABSTRACT:
A rapid thermal processing apparatus and a method of using such apparatus for the continuous heat treatment of at least one workpiece, which apparatus includes a cavity of generally elongated shape, a process chamber defined by interior walls inside the cavity, a device for delivering, regulating and extracting process gases from the chamber, a device for transporting at least one workpiece through the chamber in a substantially forward direction, a device for heating at least a section of the chamber, and a device for cooling the at least one workpiece downstream from the heating device. The cavity for the apparatus may also be provided in either a curved or a linear configuration for carrying out the present invention method.

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