Contamination pinning for auger analysis

Details Contamination pinning for auger analysis Contamination pinning for auger analysis

2007-10-25

2010-12-21

Berman, Jack I (Department: 2881)

Radiant energy

Electron energy analysis

C250S306000

Reexamination Certificate

active

07855362

ABSTRACT:
Electron spectroscopy methods and apparatus are disclosed. A beam of primary electrons is applied to a measurement location on a surface of a sample. A pinning flux of electrons is applied to one or more pinning regions proximate the measurement location. The pinning flux is characterized by a location, size, shape, and electron flux configured such that contaminants preferentially migrate to the pinning region rather than the measurement location. Emissions from the surface resulting from interaction with the primary electrons and the surface of the sample at the measurement location are analyzed.

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M Jacka et al., “A Fast, Parallel Acquisition, Electron Energy Analyzer: The Hyperbolic Field Analyzer”,Review of Scientific Instrumentsvol. 70, No. 5, May 1999.

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