Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate
2006-11-16
2009-11-24
Garber, Charles D. (Department: 2812)
Semiconductor device manufacturing: process
With measuring or testing
Reexamination Certificate
active
07622310
ABSTRACT:
A technique is provided for generating and subsequently monitoring the controlled environment(s) within an optical metrology instrument in such a manner as to minimize absorbing species within the light path of the metrology instrument and to minimize the build-up of contaminants on the surfaces of optical elements that may result in performance degradation. Both evacuation and backfill techniques may be utilized together along with a monitoring technique to determine if the environmental is suitable for measurements or if the environment should be regenerated. The optical metrology instrument may be an instrument which operates at wavelengths that include vacuum ultra-violet (VUV) wavelengths.
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Harrison Dale A.
Weldon Matthew
Garber Charles D.
Metrosol, Inc.
O'Keefe, Egan Peterman & Enders LLP
Stevenson Andre′ C
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