Contamination monitor for measuring a degree of contamination in

Details Contamination monitor for measuring a degree of contamination in Contamination monitor for measuring a degree of contamination in

1990-11-08

1992-03-03

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

With detector

250398, 250311, H01J 3726

Patent

active

050935771

ABSTRACT:
A degree of contamination can be measured in a charged particle beam system by means of a contamination monitor which is provided with a carrier having an aperture for transmitting a charged particle beam and a membrane which is connected to the carrier and which covers the aperture. The thickness of a contamination layer deposited on the membrane can be determined by measurement of a decrease of the transmission of the membrane as the contamination increases. The accuracy of measurement is enhanced by selecting a central portion of the particle beam transmitted by the membrane.

REFERENCES:
patent: 3778621 (1973-12-01), Mikajiri
patent: 3872305 (1975-03-01), Koike
patent: 4340815 (1982-07-01), Franks
patent: 4547669 (1985-10-01), Nakagawa et al.
patent: 4890309 (1989-12-01), Smith et al.
Scanning Electron Microscopy/1973 (Part I) "Contamination in the SEM", W. R. Bottoms, pp. 181-188.
Scanning Electron Microscopy/1971 (Part I) "Reduction of Carbon Contamination in the SEM", Brandis et al, pp. 505-510.

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