Contamination-inspecting apparatus and detection circuit

Details Contamination-inspecting apparatus and detection circuit Contamination-inspecting apparatus and detection circuit

2008-05-07

2011-10-11

Ko, Tony (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Photocell controlled circuit

C250S2140AG

Reexamination Certificate

active

08035071

ABSTRACT:
The detection part has: a subtraction module for calculating correction data from data of detection systems when a reference-voltage generation module applies a reference voltage to the detection systems; a data-holding module for holding the correction data; an addition module for making a correction of detection data; a comparison module for comparing the detection data with switching data; and a selector for switching data of the detection systems including data subjected to the correction according to the output of the comparison module.

REFERENCES:
patent: 6744261 (2004-06-01), Yamanaka
patent: 6833913 (2004-12-01), Wolf et al.
patent: 01-160537 (1989-06-01), None
patent: 07-241287 (1995-09-01), None
patent: 08-145899 (1996-06-01), None
patent: 08-320294 (1996-12-01), None
patent: 2000-088535 (2000-03-01), None
patent: 2002-271202 (2002-09-01), None
patent: 2002-300036 (2002-10-01), None
patent: 2005-526239 (2005-09-01), None

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