Contamination evaluating apparatus

Details Contamination evaluating apparatus Contamination evaluating apparatus

1996-04-04

1998-04-07

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

356237, 356375, 2502222, G01B 1100

Patent

active

057367450

ABSTRACT:
A sample placement portion is fixed to a frame. A stage and a cylindrical piezoelectric element are attached to the sample placement portion, and on this piezoelectric element, a sample (i.e., a semiconductor wafer) is positioned. A light collecting portion and a light receiving portion integrated together are attached slidably to frame for detecting the number and locations of contaminants. In addition, an analyzing portion for analyzing the types of the contaminants is slidably attached to the frame. Accordingly, it is made possible to reduce the size of the apparatus and to perform a highly reliable evaluation of the contamination.

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"Dissipation of Contact Electrified Electrons on Dielectric Thin Films with Silicon Substrate" Okusako et al., Jpn. J. Appln. Phys. vol. 33 (1994), pp. L959-L961.
"Limitations on Detecting Particles Sticking to Wafer", Takami et al., Semiconductor World 1994.8, 99.78-83, with English abstract, Aug. 1994.

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