Radiant energy – Radiation controlling means – Shields
Reexamination Certificate
2007-05-16
2010-06-15
Vanore, David A. (Department: 2881)
Radiant energy
Radiation controlling means
Shields
C250S492100, C355S030000
Reexamination Certificate
active
07737425
ABSTRACT:
A contamination barrier configured to permit radiation from a radiation source to pass through and to capture debris from the radiation source. The contamination barrier includes a support structure, a plurality of plate members arranged on the support structure and extending in a radial direction from an axis of the support structure, and a shield configured to block at least part of the support structure from being hit by radiation or debris from the radiation source.
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Bakker Levinus Pieter
Box Wilhelmus Josephus
Dierichs Marcel Mathijs Theodore Marie
Freriks Johannes Maria
Schuurmans Frank Jeroen Pieter
ASML Netherlands B.V.
Johnston Phillip A.
Pillsbury Winthrop Shaw & Pittman LLP
Vanore David A.
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