Contamination barrier with expandable lamellas

Details Contamination barrier with expandable lamellas Contamination barrier with expandable lamellas

2007-07-24

2007-07-24

Wells, Nikita (Department: 2881)

Radiant energy

Irradiation of objects or material

C250S461100, C355S030000, C359S633000

Reexamination Certificate

active

10743265

ABSTRACT:
A contamination barrier that passes through radiation from a radiation source and captures debris coming from the radiation source is disclosed. The contamination barrier includes an inner ring, an outer ring, and a plurality of lamellas. The lamellas extend in a radial direction from a main axis, and each of the lamellas is positioned in a respective plane that include the main axis. At least one outer end of each of the lamellas is slidably connected to at least one of the inner and outer ring.

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