Contamination barrier and lithographic apparatus comprising...

Details Contamination barrier and lithographic apparatus comprising... Contamination barrier and lithographic apparatus comprising...

2006-03-29

2008-11-18

Berman, Jack I (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S50400H, C378S034000, C378S119000, C355S030000

Reexamination Certificate

active

07453071

ABSTRACT:
A rotatable contamination barrier is disclosed that has a plurality of closely packed blades configured to trap contaminant material coming from a radiation source. The blades are radially oriented relative to a central rotation axis of the contamination barrier. The blades comprise a metal compound having crystals oriented generally radially relative to the central rotation axis.

REFERENCES:
patent: 4408338 (1983-10-01), Grobman
patent: 4837794 (1989-06-01), Riordan et al.
patent: 6359969 (2002-03-01), Shmaenok
patent: 6459472 (2002-10-01), De Jager et al.
patent: 6838684 (2005-01-01), Bakker et al.
patent: 7034308 (2006-04-01), Bakker et al.
patent: 7057190 (2006-06-01), Bakker et al.
patent: 7106832 (2006-09-01), Klunder et al.
patent: 7145132 (2006-12-01), Bakker et al.
patent: 2004/0184014 (2004-09-01), Bakker et al.
patent: 2006/0012761 (2006-01-01), Bakker et al.
patent: 2006/0138348 (2006-06-01), Bakker
patent: 2006/0138362 (2006-06-01), Bakker et al.
patent: 2006/0139604 (2006-06-01), Wassink et al.
patent: 2006/0151717 (2006-07-01), Klunder et al.
patent: 2006/0169929 (2006-08-01), Wassink
patent: 2006/0186353 (2006-08-01), Wassink
patent: 2006/0261290 (2006-11-01), Van Herpen et al.
patent: 2007/0018118 (2007-01-01), Sjmaenok et al.
patent: 2007/0023706 (2007-02-01), Sjmaenok et al.
patent: 102 37 901 (2004-05-01), None
patent: 1 274 287 (2003-01-01), None
patent: 1 434 098 (2004-06-01), None
patent: 1 491 963 (2004-12-01), None
patent: 1 491 963 (2005-08-01), None
patent: 9-320792 (1997-12-01), None
patent: 2000-98098 (2000-04-01), None
patent: 2001-57298 (2001-02-01), None
patent: WO 99/42904 (1999-08-01), None
patent: WO 01/37309 (2001-05-01), None
Levinus Pieter Bakker, U.S. Appl. No. 11/493,848, filed Jul. 27, 2006.
Leonid Aizikovitch Sjmaenok, U.S. Appl. No. 11/481,252, filed Jul. 6, 2006.
Arnoud Cornelis Wasink, U.S. Appl. No. 11/433,761, filed May 15, 2006.
Lambertus Adrianus Van Den Wildenberg, U.S. Appl. No. 11/392,951, filed Mar. 30, 2006.
Derk Jan Wilfred Klunder, U.S. Appl. No. 11/319,190, filed Dec. 28, 2005.
Derk Jan Wilfred Klunder, U.S. Appl. No. 11/294,347, filed Dec. 6, 2005.
Leonid Aizikovitch Sjmaenok, U.S. Appl. No. 11/175,036, filed Jul. 6, 2005.
Maarten Marinus Johannes Wilhelmus Van Herpen, U.S. Appl. No. 11/133,460, filed May 20, 2005.

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