Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2006-03-29
2008-11-18
Berman, Jack I (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S50400H, C378S034000, C378S119000, C355S030000
Reexamination Certificate
active
07453071
ABSTRACT:
A rotatable contamination barrier is disclosed that has a plurality of closely packed blades configured to trap contaminant material coming from a radiation source. The blades are radially oriented relative to a central rotation axis of the contamination barrier. The blades comprise a metal compound having crystals oriented generally radially relative to the central rotation axis.
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ASML Netherlands B.V.
Berman Jack I
Pillsbury Winthrop Shaw & Pittman LLP
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