Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2008-05-06
2008-05-06
Kim, Robert (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S493100, C250S50400H, C384S199000
Reexamination Certificate
active
07368733
ABSTRACT:
A rotatable contamination barrier for use with an EUV radiation system is disclosed. The contamination barrier has a blade structure configured to trap contaminant material coming from a radiation source, a bearing structure, coupled to a static frame, configured to rotatably bear the blade structure, and an eccentric mass element displaced relative to a central axis of rotation to balance the blade structure in the bearing structure.
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ASML Netherlands B.V.
Kim Robert
Maskell Michael
Pillsbury Winthrop Shaw & Pittman LLP
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