Contamination barrier and lithographic apparatus

Details Contamination barrier and lithographic apparatus Contamination barrier and lithographic apparatus

2006-05-15

2008-10-28

Vanore, David A. (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

Reexamination Certificate

active

07442948

ABSTRACT:
A rotatable contamination barrier is disclosed. The barrier includes a plurality of closely packed blades for trapping contaminant material coming from an EUV radiation source. The blades are oriented radially relative to a central rotation axis of the contamination barrier. The contamination barrier is segmented in an inner segment and an outer segment relative to the central rotation axis. Accordingly, higher revolution speeds may be attained without compromising the contamination barrier.

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