Contaminant particle removal by optical tweezers

Details Contaminant particle removal by optical tweezers Contaminant particle removal by optical tweezers

2005-09-13

2005-09-13

Zarneke, David (Department: 2891)

Semiconductor device manufacturing: process

Packaging or treatment of packaged semiconductor

Including contaminant removal or mitigation

C438S120000, C438S129000, C438S597000, C438S734000, C438S906000

Reexamination Certificate

active

06943062

ABSTRACT:
The invention describes how contaminant particles may be removed from a surface without in any way damaging that surface. First, the positional co-ordinates of all particles on the surface are recorded. Optionally, only particles that can be expected to cause current or future damage to the surface are included. Then, using optical tweezers, each particle is individually removed and then disposed of. Six different ways to remove and dispose of particles are described.

REFERENCES:
patent: 3808550 (1974-04-01), Ashkin
patent: 4893886 (1990-01-01), Ashkin et al.
patent: 5079169 (1992-01-01), Chu et al.
patent: 5245466 (1993-09-01), Burns et al.
patent: 5512745 (1996-04-01), Finer et al.
patent: 5620857 (1997-04-01), Weetall et al.
patent: 5689109 (1997-11-01), Schutze
patent: 5950071 (1999-09-01), Hammond et al.
patent: 5953166 (1999-09-01), Shikano
patent: 6055106 (2000-04-01), Grier et al.
patent: 6139831 (2000-10-01), Shivashankar et al.
patent: 6216538 (2001-04-01), Yasuda et al.
patent: 6371135 (2002-04-01), Ryskoski
patent: 6416190 (2002-07-01), Grier et al.
patent: 6566169 (2003-05-01), Uziel et al.
patent: 2002/0108859 (2002-08-01), Wang et al.
patent: 2004/0036976 (2004-02-01), Grier et al.

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