Measuring and testing – Fluid pressure gauge – Diaphragm
Reexamination Certificate
2006-02-07
2006-02-07
Lefkowitz, Edward (Department: 2855)
Measuring and testing
Fluid pressure gauge
Diaphragm
C073S700000, C073S715000, C073S718000, C361S280000, C361S283400
Reexamination Certificate
active
06993973
ABSTRACT:
The disclosed transducer includes a housing, a diaphragm, an inner conductor, an outer conductor, and a first baffle. The housing defines an interior volume. The diaphragm is disposed in the housing and divides the interior volume into a first chamber and a second chamber. The diaphragm flexes in response to pressure differentials in the first and second chambers. The inner conductor is disposed in the first chamber. The outer conductor is disposed in the first chamber around the inner conductor. The first baffle is disposed in the second chamber and defines an inner region, a middle region, and an outer region. The inner region underlies the inner conductor. The middle region underlies the outer conductor. The outer region underlies neither the inner conductor nor the outer conductor. The first baffle defines apertures in at least two of the inner, middle, and outer regions.
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Lischer D. Jeffrey
Traverso Robert
Ellington Alandra
Lefkowitz Edward
MKS Instruments Inc.
Wilmer Cutler Pickering Hale and Dorr LLP
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