Containment ring for substrate carrier apparatus

Details Containment ring for substrate carrier apparatus Containment ring for substrate carrier apparatus

1997-05-07

2000-08-29

Scherbel, David A.

Abrading

Machine

Rotary tool

451287, 451288, 451397, 451398, B24B 500, B24B 2900

Patent

active

061100250

ABSTRACT:
This invention involves a containment ring that may be used in conjunction with a substrate carrier used for polishing a substrate to give the substrate a smooth and planar surface. The containment ring is generally constructed such that it tilts independently of the substrate carrier platen that supports the substrate during polishing. The containment ring is constructed with a surface that supports a small perimeter portion of the back side of the substrate during polishing and has an enclosed area sufficient to allow the substrate to precess.

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