Containment apparatus

Details Containment apparatus Containment apparatus

1996-08-29

1998-08-18

Spisich, Mark

Brushing, scrubbing, and general cleaning

Machines

Brushing

15 211, 15 883, 134902, 220469, 312291, 312400, B08B 1100, B08B 1300

Patent

active

057942994

ABSTRACT:
A semiconductor processing system, such as a system for scrubbing both sides of a wafer at the same time, that includes a brush box containment apparatus for use with highly-acidic or other volatile chemical solutions, a roller positioning apparatus and a (brush) placement device.

REFERENCES:
patent: 2324332 (1943-07-01), Stoddard
patent: 2569958 (1951-10-01), Struve et al.
patent: 3489608 (1970-01-01), Jacobs et al.
patent: 3727620 (1973-04-01), Orr
patent: 4510954 (1985-04-01), Miller
patent: 5067193 (1991-11-01), Thomas

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