Container transport system and measurement container

Details Container transport system and measurement container Container transport system and measurement container

2011-04-05

2011-04-05

Rogers, David A. (Department: 2856)

Measuring and testing

Instrument proving or calibrating

Volume of flow, speed of flow, volume rate of flow, or mass...

C073S001250, C073S04050R, C073S049100, C073S049500

Reexamination Certificate

active

07918122

ABSTRACT:
A stocker1includes a storage FOUP20, plural purge units50, a measurement FOUP30and a stacker crane60. The storage FOUP20stores a semiconductor wafer inside. The measurement FOUP30includes a flow meter inside. The purge unit50includes a purge shelf51having plural purge tables54for placing the storage FOUP20, and a nitrogen gas is supplied into the storage FOUP20placed on the purge table54. The stacker crane60transports the storage container20onto the purge table54, and the measurement FOUP30is transported between the plural purge tables54.

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