Measuring and testing – Liquid level or depth gauge – Sight glass
Patent
1998-05-07
2000-02-08
Williams, Hezron
Measuring and testing
Liquid level or depth gauge
Sight glass
73323, G01F 2302
Patent
active
060216697
ABSTRACT:
A container of coolant used in a NIKON.TM. stepper is utilizing a transparent duct mounted on a side of the container of coolant to check a liquid level. The container of coolant can be conventional or other similar container of coolant.
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patent: 3592018 (1971-07-01), Widdowson
patent: 4107999 (1978-08-01), Lang
patent: 4220048 (1980-09-01), Grepiotis et al.
patent: 4888980 (1989-12-01), DeRome
Cheng Patrick
Chia Wei-Sheng
Chiu Shih-Hsun
Lee Li-Chung
United Microelectronics Corp.
Williams Hezron
Worth Willie Morris
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