Refrigeration – Structural installation – With electrical component cooling
Patent
1998-05-08
2000-10-03
Wayner, William
Refrigeration
Structural installation
With electrical component cooling
16510432, 237248, 437248, F28D 1500, F25D 2312
Patent
active
061256447
ABSTRACT:
A container of coolant used in a NIKON.TM. stepper is utilizing a screw cap to air-tightly close a coolant inlet of the container of coolant. The container of coolant is a closed system except the coolant inlet, a circulative input duct and a circulative output duct.
REFERENCES:
patent: 2134802 (1938-11-01), Rentz
patent: 3593747 (1971-07-01), Mercier
patent: 3820593 (1974-06-01), Pabst
Cheng Patrick
Chia Wei-Sheng
Chiu Shih-Hsun
Lee Li-Chung
United Microelectronics Corp.
Wayner William
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