Container for the handling of semiconductor devices and process

Details Container for the handling of semiconductor devices and process Container for the handling of semiconductor devices and process

1987-11-06

1990-10-16

Bucci, David A.

Material or article handling

Device for emptying portable receptacle

Nongravity type

553851, 55473, 981153, B65D 8874, H01L 2168

Patent

active

049630695

ABSTRACT:
The container and transfer process are intended to prevent stop contamination of semiconductor devices from occurring, even if the container is stored or handled under unclean room conditions. The semiconductor devices are subjected to an approximately laminar clean air stream passing around them in a clean air zone. A higher static pressure is maintained in the clean air zone than in the surrounding space which might be polluted with an inadmissibly high number of particles. The clean air stream carries along any dirt particles there may still be, so that they cannot settle on the semiconductor devices. Owing to the higher static pressure, a forced flow from the clean air zone of the higher static pressure outwards into the surrounding space is achieved, thus preventing an ingress of dirt particles from the surrounding space.

REFERENCES:
patent: 3923191 (1975-12-01), Johnson
patent: 4205121 (1980-05-01), Naitoh
patent: 4506455 (1985-03-01), Rossi
patent: 4534389 (1985-08-01), Tullis
patent: 4636128 (1987-01-01), Millis et al.
patent: 4649830 (1987-03-01), Tanaka
patent: 4666479 (1987-05-01), Shoji
patent: 4678390 (1987-07-01), Bonneton et al.
patent: 4684021 (1987-08-01), Niebling et al.
patent: 4701096 (1987-10-01), Fisher, Jr.
patent: 4724874 (1988-02-01), Parikh et al.
patent: 4744715 (1988-05-01), Kawabata
patent: 4770680 (1988-09-01), Machida et al.
patent: 4778331 (1988-10-01), Kimata et al.
patent: 4867629 (1989-09-01), Iwosawa et al.

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