Container for holding substrate

Details Container for holding substrate Container for holding substrate

1982-11-29

1983-12-27

Dixson, Jr., William T.

Special receptacle or package

For a building component

Shingle

206334, 206454, 206565, 312 61, B65D 8530, B65D 8102, H01N 1354

Patent

active

044225474

ABSTRACT:
A container for a piece of substrate such as reticle, mask or wafer is disclosed. The container comprises a housing body having an opening for receiving a substrate, a door for closing and opening said opening of the housing body and means for fixing the received substrate to the container. Said fixing means includes a contact member movable to fix the substrate in the position and a member for moving the contact member in link with the motion of the door.

REFERENCES:
patent: 2275373 (1942-03-01), Barrett
patent: 3353656 (1967-11-01), Brown
patent: 3383507 (1968-05-01), Brackett et al.
patent: 3615006 (1971-10-01), Freed

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