Container, container producing method, substrate processing...

Details Container, container producing method, substrate processing... Container, container producing method, substrate processing...

2004-03-04

2010-11-02

Cleveland, Michael (Department: 1712)

Coating apparatus

Gas or vapor deposition

Multizone chamber

C206S832000, C277S590000, C277S595000

Reexamination Certificate

active

07824496

ABSTRACT:
A pressure resistant case (22) is constructed in a rectangular parallelepiped box shape by assembling a bottom plate (61) and ceiling plate (62) and first side plate (63) and second side plate (64) and third side plate (65) and a fourth side plate (66) formed of thick aluminum plate and by welding on four sides by the TIG welding method. In the TIG welding of the ceiling plate (62) and the first side plate (63), the end surface on the side where a hollow section (72) of the ceiling plate (62) is formed, abuts against the main surface on the side where the locating section (71) of the first side plate (63) is formed. The edge near the hollow section (72) of the ceiling plate (62) is abutted against the locating section (71), and a fillet weld section (75) is formed by TIG welding on the corner section formed by the ceiling plate (62) and the locating section (71). The heat capacity of the hollow section of the ceiling plate and the locating section for TIG welding is small so that the fillet weld section can be formed even in aluminum plate possessing a high thermal conductivity. The vacuum performance, etc. of the pressure resistant case can be maintained since the slit formed between the contact surfaces is blocked by the fillet weld section.

REFERENCES:
patent: 4929408 (1990-05-01), Lodder et al.
patent: 4962726 (1990-10-01), Matsushita et al.
patent: 6142773 (2000-11-01), Shimazu
patent: 9-297192 (1997-11-01), None
patent: 2003-139887 (2003-05-01), None
Office Action dated Jul. 1, 2008 corresponding to Japanese Patent Application No. 2005-503988.

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