Container apparatus for handling semiconductor wafers

Details Container apparatus for handling semiconductor wafers Container apparatus for handling semiconductor wafers

1977-01-27

1979-12-04

Kunig, Stephen G.

Supports: racks

Special article

Platelike

220 223, 206328, 414405, 53392, A47G 1908, B65B 2102

Patent

active

041767519

ABSTRACT:
A modified etch boat acts as a transfer device for transferring wafers, in bulk. An etch boat has a longitudinal hole through one wall near the top edge, the hole periphery extending into Vee grooves in the etch boat. With wafers in the grooves, a rod inserted through the hole prevents wafers from falling out. With wafers in a storage box, the modified etch boat is positioned on the storage box, the hole inverted, and then the rod inserted after the wafers have transferred. The etch boat can then be inverted over a furnace boat, for example. After positioning on the furnace boat, with the wafers lifted slightly, the rod is removed and then the etch boat lifted off. The reverse operation is used to transfer from a furnace boat.

REFERENCES:
patent: 3497058 (1970-02-01), Walker et al.
patent: 3877134 (1975-04-01), Shanahan
patent: 3926305 (1975-12-01), Wallestad
patent: 3934733 (1976-01-01), Worden
patent: 3949891 (1976-04-01), Butler et al.
patent: 4023691 (1977-05-01), Perel
patent: 4043451 (1977-08-01), Johnson

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