Container and method of transporting substrate using the same

Details Container and method of transporting substrate using the same Container and method of transporting substrate using the same

2006-03-03

2010-02-09

Glick, Edward J (Department: 2882)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C355S053000, C355S072000

Reexamination Certificate

active

07659966

ABSTRACT:
An exposure apparatus for performing exposure of a substrate to light via a reticle. The apparatus includes a first stage configured to hold a chuck. The chuck has a support base with an electrode, and forms a container, for one of the substrate and the reticle, together with a cover. The container electrostatically chucks the one on the support base by the electrode. A transporter transports the container in which the one is contained, and loads the chuck, which chucks the one, on the first stage without the cover. A second stage holds the other of the substrate and the reticle. The apparatus obtains a first positional shift amount between the chuck and the one chucked on the chuck before the transportation by the transporter, to measure a second positional shift amount between a reference mark on the chuck held by the first stage and a reference mark on the second stage, and corrects positions of the first and second stages based on the first and second positional shift amounts, to perform the exposure.

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European Search Report dated Oct. 12, 2006, issued in corresponding European patent application No. EP 06 00 4224, forwarded in a Communication dated Oct. 23, 2006.

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