Contacts to rod shaped Schottky gate fets

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Junction field effect transistor

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257 45, 257287, H01L 29812

Patent

active

052850900

ABSTRACT:
Electrical ohmic contacts are made to a matrix of silicon having conductive rods embedded therein without making contact to any of the rods. Those rods which extend to the surface in the selected area of the matrix to be contacted are etched to form holes. The holes are filled with insulating polycrystalline silicon. The region of the selected area is heavily doped, and an ohmic contact member is made thereto. The underlying rods are spaced from the ohmic contact member and the heavily-doped region by intervening polycrystalline silicon.

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