Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Junction field effect transistor
Patent
1992-02-06
1994-02-08
Larkins, William D.
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Junction field effect transistor
257 45, 257287, H01L 29812
Patent
active
052850900
ABSTRACT:
Electrical ohmic contacts are made to a matrix of silicon having conductive rods embedded therein without making contact to any of the rods. Those rods which extend to the surface in the selected area of the matrix to be contacted are etched to form holes. The holes are filled with insulating polycrystalline silicon. The region of the selected area is heavily doped, and an ohmic contact member is made thereto. The underlying rods are spaced from the ohmic contact member and the heavily-doped region by intervening polycrystalline silicon.
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Ditchek Brian M.
Tabasky Marvin
GTE Laboratories Incorporated
Larkins William D.
Lohmann, III Victor F.
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