Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Reexamination Certificate
2001-09-06
2003-09-09
Karlsen, Ernest (Department: 2829)
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
C324S760020
Reexamination Certificate
active
06617843
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a contactor of the device for testing a semiconductor device.
2. Description of Related Art
Generally, in order to test a semiconductor device, an electric property, a functional property, and an operation speed, etc., of a packaged product are examined with performing test program constructed by a computer. Then, according to an examine result, it is determined whether the semiconductor device has defectives or not. The test of the semiconductor device comprises a collection and analysis of an examine data, and total works to improve properties and yield of the product by feeding-back the results of the collection and analysis of the examine data to the engineer.
As shown in
FIG. 1
, such a test device for the semiconductor device comprises a user tray (
10
), a stacker (
11
), a pick-up robot (
12
), a test tray (
13
), a tester (
14
), and monitor (
15
). An operation method of the test device is as follows. When a plurality of the user tray (
10
) are charged into the stacker (
11
), the pick-up robot (
12
) picks up the respective semiconductor device and rests it on the test tray (
13
). Then, the semiconductor device transferred by other transfer means is connected to the tester (
14
), a program already set examines the semiconductor device, and an examine data is outputted by the computer and is displayed on a monitor (
15
).
At this time, in order to provide a test condition, the test device has apparatus supplying a heat or cold air for the trays (
10
,
13
).
The test device of the semiconductor device providing test conditions comprises a duct, a blow fan, a heater and a cooling tube. The duct having an input and an output entrances flows air, the blow fan can inhale and discharge an outer air into the duct or to the outside, and the heater and the cooling tube are installed in an input entrance of the blow fan and heat or cool an inhalated air.
Because the semiconductor device for the test is positioned on the duct together with the trays, the semiconductor device is indirectly heated by air inputted or outputted through the duct and the temperature condition of the test for the semiconductor device becomes fixed.
However, if the semiconductor device is indirectly heated or cooled, it takes too much time to fix the temperature condition for the test and it is difficult to maintain stable and constant the temperature condition. Accordingly, there occur problems with a usage efficiency and an operational reliability of the test device.
SUMMARY OF THE INVENTION
To overcome the problems described above, preferred embodiments of the present invention provide a contactor that can maintain and control a test temperature with high reliability by directly supplying a heating or cooling air for a semiconductor device.
In order to achieve the above object, a preferred embodiment of the present invention provides a contactor comprising a fixed block receiving a test tray having a plurality of a semiconductor device, a base plate having a cylinder on one side of the base plate and installed in one side of the fixed block, and a providing means of blending air to guide and provide the blending air for the air nozzle.
The preferred embodiment of the present invention further provides the contactor further comprising a plurality of an air nozzle contacted with the test tray and installed between the base plate and the fixed block.
The preferred embodiment of the present invention further provides the contactor further comprising a push plate moving forward and backward by the cylinder and installed between the base plate and the fixed block.
The preferred embodiment of the present invention further provides the contactor further comprising the providing means of blending air including an air duct installed between the push plate and the base plate, and a plurality of a communication vessel in an inner portion of the air duct, protruded to the air nozzle and entering into the air nozzle, and having an entrance to flow the blending air into the communication vessel.
The present embodiment of the present invention further provides the contactor comprising the air duct including a penetration hole penetrating a cylinder rod extended from the cylinder.
The present embodiment of the present invention further provides the contactor further comprising a plurality of guide axis penetrating the push plate and being between the base plate and the fixed block.
The present embodiment of the present invention further provides the contactor further comprising position determining pins to determine a position of the push plate at an opposite portion against the fixed block of the push plate when the push plate is operated toward the test tray.
The present embodiment of the present invention further provides the contactor comprising the air nozzle including an outer tube penetrating and being combined with the push plate and opening a lower and an upper portion of the outer tube, a nozzle tube opening a lower and an upper portion of the nozzle tube, a part of the nozzle installed in an inner portion of the outer tube, and a spring installed in the inner of the outer tube, one side of the spring supported by an inner and lower portion of the outer tube, and other side of the spring supported by a circumference of the nozzle to be able to be flexible in the outer tube.
REFERENCES:
patent: 3039604 (1962-06-01), Bickel et al.
patent: 3179248 (1965-04-01), Manley
patent: 4870355 (1989-09-01), Kufis et al.
patent: 5065089 (1991-11-01), Rich
patent: 5436569 (1995-07-01), Melgaard et al.
patent: 5691650 (1997-11-01), Sugai
patent: 5872458 (1999-02-01), Bordman et al.
patent: 6163145 (2000-12-01), Yamada et al.
patent: 6268740 (2001-07-01), Iida
patent: 6304093 (2001-10-01), Hilmoe et al.
Kim Kyung-Tae
Min Kyung-Jo
Yoo Ung-Hyun
Bushnell , Esq. Robert E.
Karlsen Ernest
Techwing Co., Ltd.
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