Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – Frequency of cyclic current or voltage
Patent
1980-10-27
1982-10-05
Krawczewicz, Stanley T.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
Frequency of cyclic current or voltage
324 62, G01R 2922
Patent
active
043530273
ABSTRACT:
Methods and apparatus for contactless, non-destructive resistivity measurnts on semiconducting crystalline material, for example gallium arsenide. The material to be tested is formed into a disc which is supported within an air gap. The holder for the disc is such as to support the disc only about its outer edges; thus, the disc is free to vibrate piezoelectrically. A measuring circuit connected to the electrodes, which establish the air gap, applies an alternating electric field in the air gap which causes the crystal to vibrate. By adjusting the frequency of excitation, resonance may be established in the crystal and by comparing the current drawn through the air gap with graphs previously established for material of the type under test, the resistivity of the disc can be determined.
REFERENCES:
patent: 3490036 (1970-01-01), Grenier
patent: 4092588 (1978-05-01), Desormiere et al.
patent: 4220915 (1980-09-01), Kawamoto et al.
patent: 4284946 (1981-08-01), Sharrow
Ballato Arthur
Iafrate Gerald J.
Edelberg Nathan
Krawczewicz Stanley T.
Murray Jeremiah G.
Sachs Michael C.
The United States of America as represented by the Secretary of
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