Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – Frequency of cyclic current or voltage
Patent
1984-09-06
1986-08-12
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
Frequency of cyclic current or voltage
333248, 29574, 324 585R, 324158P, G01R 2704
Patent
active
046058931
ABSTRACT:
Absolute electrical parameter values using reflected microwaves are achieved through measurement of a sample that completely fills the cross section of the waveguide. A test sample holder for a wafer shaped sample employs a choke flange type plate and a backing plate for the wafer. Semiconductor sheet resistivity and mobility values are measured.
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Eisenzopf Reinhard J.
International Business Machines - Corporation
Riddles Alvin J.
Solis Jose M.
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