Contactless current probe based on electron tunneling

Details Contactless current probe based on electron tunneling Contactless current probe based on electron tunneling

1988-07-05

1989-09-26

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

250310, G01R 1100

Patent

active

048703524

ABSTRACT:
A method and apparatus for non-destructive monitoring of the performance parameters of a photodiode prior to integration into a focal plane array are characterized by the use of electron tunneling techniques. The photodiode under test is illuminated with infrared radiation to generate a current therein. The current within the photodiode is measured by a contactless tunnel current probe. The measured current is electrically processed to determine the dynamic resistance and responsitivity of the photodiode in order to evaluate its performance. The apparatus can also be used for testing integrated circuits in the active mode at a plurality of locations.

REFERENCES:
patent: 4062632 (1977-12-01), Dixon
patent: 4694170 (1987-09-01), Slodzian et al.
patent: 4705954 (1987-11-01), Rummel et al.
patent: 4730158 (1988-03-01), Kasai et al.
patent: 4766311 (1988-08-01), Seiler et al.

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