Contactless circuit testing for adaptive wafer processing

Details Contactless circuit testing for adaptive wafer processing Contactless circuit testing for adaptive wafer processing

2007-05-08

2007-05-08

Nguyen, Ha Tran (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S754120, C324S1540PB, C324S763010, C714S733000, C714S734000

Reexamination Certificate

active

10769115

ABSTRACT:
A system and method for measuring circuits on an integrated circuit substrate includes a measurement circuit formed on the integrated circuit substrate that measures at least one characteristic of an integrated circuit. The measurement circuit has a power transfer device including a power transfer component, which receives energy from a source where the source does not make physical contact with the integrated circuit substrate to transfer power to the measurement circuit. Measurements are taken to provide feedback for in-situ adjustments to circuit parameters and responses.

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