Contacting method and apparatus in contact copying

Details Contacting method and apparatus in contact copying Contacting method and apparatus in contact copying

1985-07-18

1986-03-18

Hix, L. T.

Photocopying

Contact printing

Fluid pressure retention of carrier and receiver in exposure...

355132, G03B 2720, G03B 2702

Patent

active

045764751

ABSTRACT:
A contacting method comprises the steps of holding a photomask and a wafer at a predetermined interval, curving at least one of the photomask and the wafer so as to form a convexity relative to the other, and moving the photomask and the wafer relative to each other to bring them into intimate contact with each other.

REFERENCES:
patent: 3547537 (1970-12-01), Betron
patent: 3645622 (1972-02-01), Cachon et al.
patent: 3705769 (1972-12-01), Johannsmeier
patent: 3955163 (1976-05-01), Novak
patent: 4087181 (1978-05-01), Alexander et al.
patent: 4179110 (1979-12-01), Kosugi et al.
patent: 4218136 (1980-08-01), Komoriya et al.

Affiliated with

Also associated with

Rating

Contacting method and apparatus in contact copying does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Contacting method and apparatus in contact copying, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Contacting method and apparatus in contact copying will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2302856