Contact type micro piezoresistive shear-stress sensor

Details Contact type micro piezoresistive shear-stress sensor Contact type micro piezoresistive shear-stress sensor

2005-04-12

2005-04-12

Noori, Max (Department: 2855)

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified electrical sensor or system

C073S841000

Reexamination Certificate

active

06877385

ABSTRACT:
There is disclosed a semiconductor sensor for measuring the contact shear stress distribution between the socket of an above-knee (AK) prostheses and the soft tissue of an amputee's stump. The sensor is fabricated by the micro-electro-mechanical system (MEMS) technology, and its main sensing part is 2-X shaped with a flange structure. The sensor is prepared by anisotropic wet etching of bulk silicon in KOH solution and a square flange above the sensing diaphragm is formed through surface micromachining of deposited SiO2thin film. This invention has the following characteristics: piezo-resistivity of the monolithic silicon will be utilized to convert shear deformation of the sensor into an electrical signal and a micro sensor which can measure the shear force vector acting on the sensing flange.

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