Stock material or miscellaneous articles – Structurally defined web or sheet – Including variation in thickness
Reexamination Certificate
2005-01-26
2009-08-11
Sample, David R (Department: 1794)
Stock material or miscellaneous articles
Structurally defined web or sheet
Including variation in thickness
C428S826000, C428S831000, C428S832000, C428S832400, C428S835700, C360S015000, C360S016000, C360S017000
Reexamination Certificate
active
07572499
ABSTRACT:
A contact magnetic transfer (CMT) master template has a flexible plastic film with a planarized top or upper surface containing magnetic islands separated from one another by nonmagnetic regions. The flexible plastic film is secured at its perimeter to a silicon annulus that provides rigid support at the perimeter of the film. The plastic film is preferably polyimide that has recesses filled with the magnetic material that form the pattern of magnetic islands. The upper surfaces of the islands and the upper surfaces of the nonmagnetic regions form a continuous planar surface. The nonmagnetic regions are formed of chemical-mechanical-polishing (CMP) stop layer material that remains after a CMP process has planarized the upper surface of the plastic film.
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Bandic Zvonimir Z.
Erpelding A. David
Katine Jordan Asher
Le Quang
Lee Kim Y.
Berthold Thomas R.
Hitachi Global Storage Technologies - Netherlands B.V.
Sample David R
Simone Catherine
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