Contact fill capacitor having a sidewall that connects the upper

Details Contact fill capacitor having a sidewall that connects the upper Contact fill capacitor having a sidewall that connects the upper

1995-11-13

1997-05-20

Picard, Leo P.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

361311, 3613214, 257295, H01G 406, H01G 420

Patent

active

056318049

ABSTRACT:
Disclosed is a capacitor incorporating a material having a high dielectric constant and a method of fabricating the same. In a preferred embodiment, the bottom electrode is first deposited and patterned. A thick, planarized insulating layer is deposited over the bottom electrode and a contact via is opened in the insulating layer to exposed the bottom electrode. This via is filled with the dielectric material. A top conductive layer is deposited over the dielectric material, masked and etched to form the top conductive layer. This etch may simultaneously etch any portion of the dielectric layer overflowing the contact via.

REFERENCES:
patent: 4481283 (1984-11-01), Kerr et al.
patent: 4890191 (1989-12-01), Rokos
patent: 5053917 (1991-10-01), Miyasaka et al.
patent: 5099305 (1992-03-01), Takenaka
patent: 5187638 (1993-02-01), Sandhu et al.
patent: 5227855 (1993-07-01), Momose
patent: 5293510 (1994-03-01), Takenaka
patent: 5349494 (1994-09-01), Ando
patent: 5369296 (1994-11-01), Kato
patent: 5495117 (1996-02-01), Larson

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