Contact cooling of a projection mask

Details Contact cooling of a projection mask Contact cooling of a projection mask

1990-12-21

1992-08-25

Albritton, C. L.

Electric heating

Metal heating

By arc

21912184, 427 531, B23K 2602

Patent

active

051421208

ABSTRACT:
An apparatus and method for cooling a large-area, pass-through projection mask for excimer ablation. In a preferred embodiment, a laser-transparent window is spaced apart from the projection mask to provide a thermal escape path. The thermal escape path receives a liquid flow which is in direct contact with patterned masking material of the projection mask. The liquid, preferably deionized water, is caused to flow in a laminar fashion. The liquid intersects the laser energy of the excimer laser. In a second embodiment, the liquid flow is along the periphery of the patterned masking material.

REFERENCES:
patent: 4262186 (1981-04-01), Provancher
patent: 4661679 (1987-04-01), Pardee
patent: 4780177 (1988-10-01), Wojnarowski et al.
patent: 4791436 (1988-12-01), Chan et al.
patent: 4842677 (1989-06-01), Wojnarowski et al.
patent: 4852133 (1989-07-01), Ikeda et al.
patent: 5057184 (1991-10-01), Gupta et al.

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