Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1991-11-04
1993-09-21
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
310366, H01L 4108
Patent
active
052472221
ABSTRACT:
A new mounting configuration for piezoelectric shear mode elements is described. The element is mounted in a cantilever beam fashion. The polarization axis forms an acute angle with the mounting surface normal. A reflective electrode is affixed to a first surface of the element. The first surface normal is perpendicular to the polarization axis. A second electrode is affixed to a second surface which is parallel to the first surface. A voltage is applied across the reflective electrode and the second electrode to generate strain in the element. This results in a deflection of the reflective electrode, phase modulating electromagnetic and/or acoustic wavefronts incident on the reflective electrode. Stress distribution and hence phase modulation properties may be influenced using this mounting technique. Elements may be coupled end to end to form new devices. Anti-parallel polarization coupled elements exhibit large rates of change of deflection. These elements may be formulated by a ferroelectric inversion layer. A support structure design and a reflective electrode overhang concept are introduced. Arrays using these concepts with the mounting technique described are able to reduce electrical interference without compromising spatial resolution.
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Budd Mark O.
Dougherty Thomas M.
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