Constant temperature chamber in a handler for semiconductor devi

Details Constant temperature chamber in a handler for semiconductor devi Constant temperature chamber in a handler for semiconductor devi

1996-08-28

1999-01-12

Ballato, Josie

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

126 21A, G01R 3126, A21B 100

Patent

active

058595406

ABSTRACT:
A constant temperature chamber to be disposed in a handler for use with an IC tester is provided which is capable of preheating semiconductor devices to be measured to a preset temperature uniformly and in a short time. A rotary stage adapted to rotate with semiconductor devices to be measured loaded thereon is disposed in the bottom of the constant temperature chamber enclosed by thermal insulation walls. A heater is disposed in the upper portion of the constant temperature chamber. An axial-flow fan is positioned between the heater and the rotary stage. Further, a tubular flow-rectifying member is disposed surrounding and in proximity to the outer periphery of the axial-flow fan. A gas flow produced by rotatively driving the axial-flow fan is rectified by the flow-rectifying member with no turbulences occurring, and a circulating rectified gas flow is thereby formed from the axial-flow fan to pass through the rotary stage, and then advancing radially outwardly through between the undersurface of the rotary stage and the bottom thermal insulation wall of the constant temperature chamber, followed by rising in swirling streams along the interior of the thermal insulation walls of the chamber and flowing back to the axial-flow fan.

REFERENCES:
patent: 4450899 (1984-05-01), Jakobsson et al.
patent: 4492839 (1985-01-01), Smith
patent: 5055963 (1991-10-01), Partridge
patent: 5153815 (1992-10-01), Suzuki et al.
patent: 5205274 (1993-04-01), Smith et al.
patent: 5239917 (1993-08-01), Lutkie et al.

Affiliated with

Also associated with

Rating

Constant temperature chamber in a handler for semiconductor devi does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Constant temperature chamber in a handler for semiconductor devi, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Constant temperature chamber in a handler for semiconductor devi will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1519936