Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1993-10-12
1995-09-19
Williams, Hezron E.
Measuring and testing
Surface and cutting edge testing
Roughness
250306, G01B 0734, G01B 2130, H01J 3726
Patent
active
054507464
ABSTRACT:
A stylus profiling apparatus and method maintains constant separation, and thus constant force, between a conductive cantilever beam which extends over a conductive portion of a base and which is positioned in spaced apart relation therefrom. In particular, a piezoelectric actuator is coupled to the base and is controlled to move the base relative to the free end of the cantilever beam so as to maintain constant spacing, and thus constant force, therebetween when a stylus on the free end is moved by a surface profile. A capacitor having a pair of plates, at least one of which is coupled to the piezoelectric actuator, produces an electrical signal in response to the displacement of the actuator to provide measurement of the surface profile. The base is preferably of trapezoidal cross section and includes electrical pads on one side thereof. A probe holder includes a mating shoulder and electrical contacts for cooperatively mating with the electrical pads. Thus, the probe may be slidably removed from the holder and a new probe may be slid into the holder to allow rapid removal, replacement and alignment.
REFERENCES:
patent: 5015850 (1991-05-01), Zdeblick et al.
patent: 5025658 (1991-06-01), Elings et al.
patent: 5065103 (1991-11-01), Slinkman et al.
patent: 5107114 (1992-04-01), Nishioka et al.
patent: 5144833 (1992-09-01), Amer et al.
patent: 5172002 (1992-12-01), Marshall
patent: 5193383 (1993-03-01), Burnham et al.
patent: 5210410 (1993-05-01), Barrett
patent: 5253515 (1993-10-01), Toda et al.
patent: 5266801 (1993-11-01), Elings et al.
patent: 5304924 (1994-04-01), Yamano et al.
patent: 5329808 (1994-07-01), Elings et al.
patent: 5338932 (1994-08-01), Theodore et al.
patent: 5345815 (1994-09-01), Albrecht et al.
A Rocking Beam Electrostatic Balance for the Measurement of Small Forces, G. L. Miller et al., Rev. Sci. Instrum. 62(3), Mar. 1991, pp. 705-709.
A New Force Sensor Incorporating Force-Feedback Control for Interfacial Force Microscopy, S. A. Joyce et al., Rev. Sci. Instrum., vol. 62, No. 3, mar. 1991, pp. 710-715.
Rocking-Beam Force-Beam Approach to Atomic Force Microscopy, D. A. Grigg et al., Ultramicroscopy, 1991, pp. 1504-1508.
A Scanning Tunneling Microscope with a Capacitance-Based Position Monitor, J. E. Griffith et al., J. Vac. Sci. Technol. B8(6), Nov./Dec. 1990, pp. 2023-2027.
Resonant Phase Shift Technique for the Measurement of Small Changes in Grounded Capacitors, G. L. Miller et al., Rev. Sci. Instrum. 61(4), Apr. 1990, pp. 1267-1272.
Force Microscopy with a Bidirectional Capacitance Sensor, G. Neubauer et al., Rev. Sci. Instrum. 61(9), Sep. 1990, pp. 2296-2308.
Long Range Constant Force Profiling for Measurement of Engineering Surfaces, Howard et al., Rev. Sci. Instrum. 63(10), Oct. 1992, pp. 4289-4295, including letter regarding publication.
Dombroske George M.
The University of North Carolina
Williams Hezron E.
LandOfFree
Constant force stylus profiling apparatus and method does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Constant force stylus profiling apparatus and method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Constant force stylus profiling apparatus and method will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1821816