Constant-force profilometer with stylus-stabilizing sensor assem

Details Constant-force profilometer with stylus-stabilizing sensor assem Constant-force profilometer with stylus-stabilizing sensor assem

1994-12-22

1998-01-06

Williams, Hezron E.

Measuring and testing

Surface and cutting edge testing

Roughness

33551, 33558, 335584, G01B 528

Patent

active

057057419

ABSTRACT:
A profilometer has a constant force mechanism for biasing of the stylus arm. The mechanism has a centrally-aligned configuration of the moving magnet relative to the magnetic coil and also has a magnetic shield isolating these elements from other ferromagnetic materials in the assembly. The moving magnet is made of a material that is hard magnetically and the magnetic shield is made of a series of low hysteresis, high permeability materials. The force thus generated by the stylus biasing device is very linear with the drive current upon the magnetic coil at any particular position of the stylus, thereby allowing for control and predictability of the stylus force upon the surface to be profiled. This predictability is used for dynamic stylus force adjustments during profiling of a specimen. The profilometer is also equipped with a balanced, spring-loaded stylus-stabilizing sensor assembly, task-specific dual-view optics for protection of the delicate stylus assembly, and a temperature drift compensator.

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