Consecutive wafer transfer apparatus and method

Details Consecutive wafer transfer apparatus and method Consecutive wafer transfer apparatus and method

1979-02-16

1981-01-13

Sheridan, Robert G.

Material or article handling

Device for emptying portable receptacle

For emptying contents thereof into portable receiving means

414786, B65G 6504

Patent

active

042446732

ABSTRACT:
An apparatus and method for consecutively transferring wafers used in the fabrication of semiconductor devices between carriers having either the same spacing distance or different spacing distances are disclosed. A plate is positioned below an inverted first carrier and above a second carrier. The position of the plate and the second carrier is changed so that wafers fall consecutively from notches in the first carrier into every nth notch in the second carrier, where n is a positive integer.

REFERENCES:
patent: 3949891 (1976-04-01), Butler et al.
patent: 4176751 (1979-12-01), Gillissie

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