Connection device

Details Connection device Connection device

2009-03-03

2011-10-18

Johnston, Phillip A (Department: 2881)

Radiant energy

Irradiation of objects or material

C250S50400H, C355S030000

Reexamination Certificate

active

08039820

ABSTRACT:
There is provided a connection device for connecting a first depressurization vessel to a second depressurization vessel. The connection device includes a communication hole comprising a first opening which is connected to the first depressurization vessel, and a second opening which is connected to the second depressurization vessel, the first opening and the second opening being, respectively, at opposite ends of the communication hole such that extreme ultraviolet radiation passes in a radiation direction from the first opening to the second opening; a gas inlet through which a gas flows into the communication hole in a direction perpendicular to the radiation direction of the extreme ultraviolet radiation; and a gas outlet which is opposed to the gas inlet such that the gas passes out the gas outlet.

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