Connecting structure for vacuum pump

Details Connecting structure for vacuum pump Connecting structure for vacuum pump

2005-05-31

2005-05-31

Koczo, Jr., Michael (Department: 3746)

Pumps

Motor driven

Resiliently mounted pump or motor

C417S423400, C417S572000

Reexamination Certificate

active

06899529

ABSTRACT:
Provided is a connecting structure for a vacuum pump, which can block propagation of electrical noise, generated by a main body of the vacuum pump. Between both ends of a connection piping for connecting the vacuum pump to a vacuum chamber of an apparatus to be connected with and evacuated by the vacuum pump, there is interposedly provided an electrical insulating portion formed of an insulating material so as to provide electrical insulation therebetween. The electrical insulation portion may be provided to a connection piping member such as a damper (or a valve depending on the connection arrangement) for absorbing mechanical vibrations.

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patent: 10001509 (2001-07-01), None
patent: 1118774 (2001-07-01), None
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patent: 2000-73986 (2000-03-01), None

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