Conical rapid thermal processing apparatus

Details Conical rapid thermal processing apparatus Conical rapid thermal processing apparatus

1992-09-29

1993-10-12

Reynolds, Bruce A.

Electric resistance heating devices

Heating devices

Radiant heater

392418, 219390, 219405, 118724, 432120, A21B 200, F26B 330, F27B 904, F27B 906

Patent

active

052533247

ABSTRACT:
A conical rapid thermal processing system includes a conical thermal radiation reflector and a plurality of elongated radiant heating sources within the conical thermal radiation reflector. The elongated radiant heating sources pass through an imaginary conical surface within the conical thermal radiation reflector. A wafer holder within the imaginary conical surface holds the wafer face transverse to the common axis of the conical reflector and the conically arranged radiant heating lamps. The conical thermal radiation reflector and conically arranged lamps provide uniform radiant heating across the face of a wafer without significantly degrading coupling efficiency.

REFERENCES:
patent: 3862397 (1975-01-01), Anderson et al.
patent: 4446817 (1984-05-01), Crawley
patent: 4789921 (1988-12-01), Aho
patent: 5070815 (1991-10-01), Kasai et al.
patent: 5133286 (1992-07-01), Choo et al.
Deines, J. L. and Hu, S. M., "Susceptor-Reactor", IBM Technical Disclosure Bulletin, vol. 17, No. 2, Jul. 1974.

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