Conformal coatings for micro-optical elements, and method...

Details Conformal coatings for micro-optical elements, and method... Conformal coatings for micro-optical elements, and method...

2007-11-13

2007-11-13

Bashore, Alain L. (Department: 1762)

Coating processes

Optical element produced

C427S163100, C427S163200, C427S164000, C427S166000, C427S167000, C427S248100, C427S255150, C427S255190, C427S255230, C427S255260, C427S255700, C427S402000, C427S419200, C427S419300, C117S084000, C117S088000, C117S089000, C117S093000, C117S105000, C359S580000, C359S581000, C359S586000, C359S588000, C359S885000, C359S888000

Reexamination Certificate

active

10404928

ABSTRACT:
A micro-optical element is produced through vapor deposition techniques, such as atomic layer deposition. An optical structure having a surface with uneven structures is exposed to one or more precursor vapors to create a self-limiting film growth on the surface of the optical structure. The film thickness may be increased and controlled by subsequent exposures. The resulting film conforms to surface structures having varying complex dimensions.

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