Confocal reflectommeter/ellipsometer to inspect...

Details Confocal reflectommeter/ellipsometer to inspect... Confocal reflectommeter/ellipsometer to inspect...

2007-10-30

2007-10-30

Stafira, Michael P. (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

C356S237200

Reexamination Certificate

active

11243348

ABSTRACT:
A device and method for measuring a fusion seal quality within a structure comprising a source for providing a focused optical beam of a known intensity to a fusion seal within a structure, the fusion seal reflecting the optical beam according to the fusion seal quality, a receiver for receiving the reflected optical beam and a processor are presented for measuring a intensity ratio between the reflected optical beam and the focused optical beam relating to fusion seal quality. The device may scan the structure and provide an intensity ratio image map for a region within the structure related to fusion seal quality.

REFERENCES:
patent: 2002/0102749 (2002-08-01), Fielden et al.
patent: 2002/0106848 (2002-08-01), Wack et al.
patent: 2002/0180985 (2002-12-01), Wack et al.
patent: 2005/0012939 (2005-01-01), Snyder et al.
E. Hecht, Optics (Addison-Wesley, Reading, 1987), pp. 363-368.

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