Optics: measuring and testing – Range or remote distance finding – With photodetection
Patent
1994-12-28
1996-12-03
Hellner, Mark
Optics: measuring and testing
Range or remote distance finding
With photodetection
356359, G01B 1100
Patent
active
055813453
ABSTRACT:
A confocal laser scanning mode interferene contrast microscope comprises a laser source, an illuminating optical system for condensing a light beam from the laser source and forming a light spot on an object to be examined, a condensing optical system for condensing the light beam from the object to be examined on a detecting surface, a detecting device for detecting the light beam condensed on the detecting surface, the detecting device having a substrate formed with a channel waveguide and two light detecting elements, the channel waveguide having a double mode channel waveguide having an entrance end surface on the detecting surface and a waveguide fork which forks the double mode channel waveguide into two channel waveguides, the two detecting elements detecting lights propagated through the two channel waveguides, a scanning device for moving the object to be examined and the light spot relative to each other, and a signal processing device for producing differential information of the object to be examined by the detection signals of the detecting elements.
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Iwasaki Jun
Iwasaki Yutaka
Matsuura Keiji
Oki Hiroshi
Shionoya Takashi
Hellner Mark
Nikon Corporation
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