Confocal laser scanning microscope

Details Confocal laser scanning microscope Confocal laser scanning microscope

1988-03-10

1989-09-05

Arnold, Bruce Y.

Radiant energy

Ionic separation or analysis

Static field-type ion path-bending selecting means

350 691, 250566, 250310, G02B 2610

Patent

active

048632260

ABSTRACT:
Confocal laser scanning microscope comprising a laser as point light source, a deflection system for the line and frame scanning and a lens system, at least one objective near the object, an object stage, a spatial filter and a detector, and an electronic control and imaging-processing system. The object is scanned point by point by the light beam and measurement is made with the detector only where the point light source is focused so that out-of-focus light is not detected. As a result resolution and contrast in three dimensions, in particular, axially to the image plane can be improved considerably, and 3D information can be derived from the object. For the more rapid line scanning, the deflection system of the present invention comprises an acousto-optical deflector and comprises for the slower frame scanning, another deflector constructed in a manner such that at least the frame-scanning movement of the return light beam is completely eliminated, as a result of which the return light is focused on the spatial filter.

REFERENCES:
patent: 4044363 (1977-08-01), Morgan
patent: 4634880 (1987-01-01), Lindow et al.
patent: 4640626 (1987-02-01), Schmid et al.
patent: 4727381 (1988-02-01), Bille et al.
J. G. De La Rosa et al., "Wafer Inspection With a Laser Scanning Microscope", AT&T Technical Journal, vol. 65, No. 1, Jan./Feb. 1986, pp. 68-77, Short Hills, New Jersey, US.

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