Optical: systems and elements – Compound lens system – Microscope
Reexamination Certificate
2005-11-29
2005-11-29
Nguyen, Thong Q (Department: 2872)
Optical: systems and elements
Compound lens system
Microscope
C359S234000, C356S237400
Reexamination Certificate
active
06970287
ABSTRACT:
An inspection device comprises a light source, a pellicle beamsplitter for receiving light from the light source and for redirecting the light, and an aperture array for receiving light from the pellicle beamsplitter. The aperture array is a two dimensional array of pinholes having an x axis and a y axis ninety degrees apart, wherein the distance between pinholes in the x direction is greater than the distance between pinholes in the y direction. The inspection device further comprises an imaging system comprising an object imager including a plurality of lenses, a camera reimager including a plurality of lenses, and a camera for acquiring an image.
REFERENCES:
patent: 3926500 (1975-12-01), Frosch et al.
patent: 4719341 (1988-01-01), Hoogenboom
patent: RE32660 (1988-05-01), Lindow et al.
patent: 4802748 (1989-02-01), McCarthy et al.
patent: 4806004 (1989-02-01), Wayland
patent: 4930896 (1990-06-01), Horikawa
patent: 4965442 (1990-10-01), Girod et al.
patent: 5067805 (1991-11-01), Corle et al.
patent: 5072128 (1991-12-01), Hayano et al.
patent: 5073018 (1991-12-01), Kino et al.
patent: 5083220 (1992-01-01), Hill
patent: 5248876 (1993-09-01), Kerstens et al.
patent: 5329358 (1994-07-01), Horijon
patent: 5386317 (1995-01-01), Corle et al.
patent: 5428475 (1995-06-01), Tanaami et al.
patent: 5448359 (1995-09-01), Schick et al.
patent: 5594242 (1997-01-01), Konishi et al.
patent: 5633751 (1997-05-01), Tanaami et al.
patent: 5696591 (1997-12-01), Bilhorn et al.
patent: 5734497 (1998-03-01), Yano et al.
patent: 5737084 (1998-04-01), Ishihara
patent: 5991040 (1999-11-01), Doemens et al.
patent: 6108090 (2000-08-01), Ishihara
patent: 6224276 (2001-05-01), Funayama et al.
patent: 6288382 (2001-09-01), Ishihara
patent: 6426835 (2002-07-01), Endo et al.
patent: 6773935 (2004-08-01), Watkins et al.
patent: 0 615607 (1992-11-01), None
patent: WO 92/14118 (1992-08-01), None
patent: WO 93/11403 (1993-06-01), None
patent: WO 99/63381 (1999-12-01), None
patent: WO 01/37025 (2001-05-01), None
patent: WO 03/008940 (2003-01-01), None
Vaughn David
Watkins Cory
August Technology Corp.
Dicke Billig & Czaja, PLLC
Nguyen Thong Q
LandOfFree
Confocal 3D inspection system and process does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Confocal 3D inspection system and process, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Confocal 3D inspection system and process will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3484203