Confocal 3D inspection system and process

Details Confocal 3D inspection system and process Confocal 3D inspection system and process

2005-04-19

2005-04-19

Turner, Samuel A. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S609000

Reexamination Certificate

active

06882415

ABSTRACT:
A confocal three dimensional inspection system, and process for use thereof, allows for rapid inspecting of bumps and other three dimensional (3D) features on wafers, other semiconductor substrates and other large format micro topographies. The sensor eliminates out of focus light using a confocal principal to create a narrow depth response in the micron range.

REFERENCES:
patent: 4719341 (1988-01-01), Hoogenboom
patent: RE32660 (1988-05-01), Lindow et al.
patent: 4802748 (1989-02-01), McCarthy et al.
patent: 4930896 (1990-06-01), Horikawa
patent: 4965442 (1990-10-01), Girod et al.
patent: 5067805 (1991-11-01), Corle et al.
patent: 5072128 (1991-12-01), Hayano et al.
patent: 5073018 (1991-12-01), Kino et al.
patent: 5083220 (1992-01-01), Hill
patent: 5248876 (1993-09-01), Kerstens et al.
patent: 5329358 (1994-07-01), Horijon
patent: 5386317 (1995-01-01), Corle et al.
patent: 5428475 (1995-06-01), Tanaami et al.
patent: 5448359 (1995-09-01), Schick et al.
patent: 5594242 (1997-01-01), Konishi et al.
patent: 5668665 (1997-09-01), Choate
patent: 5696591 (1997-12-01), Bilhorn et al.
patent: 5734497 (1998-03-01), Yano et al.
patent: 5737084 (1998-04-01), Ishihara
patent: 5760902 (1998-06-01), Brody
patent: 5946100 (1999-08-01), Ishihara
patent: 5991040 (1999-11-01), Doemens et al.
patent: 6108090 (2000-08-01), Ishihara
patent: 6224276 (2001-05-01), Funayama et al.
patent: 6288382 (2001-09-01), Ishihara
patent: 6373978 (2002-04-01), Ishihara
patent: 6426835 (2002-07-01), Endo et al.
patent: 6512385 (2003-01-01), Pfaff et al.
patent: 1 949 117 (1969-09-01), None
patent: 0 615607 (1992-11-01), None
patent: WO 0137025 (2001-05-01), None
patent: WO 9214118 (1992-08-01), None
patent: WO 9311403 (1993-06-01), None
patent: WO 03008940 (2003-06-01), None
A copy of PCT International Search Report mailed on Jan. 2, 2003 (7 pages).

Affiliated with

Also associated with

Rating

Confocal 3D inspection system and process does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Confocal 3D inspection system and process, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Confocal 3D inspection system and process will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3442550